L.J. Tang

Annealing and oxidation of silicon oxide films prepared by plasma-enhanced chemical vapor deposition

X.Y. Chen, Yu Lu, L.J. Tang et al. · Journal of Applied Physics · 2004 · 113 citations

Engineering, Si Oxide, Optoelectronic Devices +18

A study of the cutting performance of poly-crystalline oxygen free copper with single crystalline diamond micro-tools

Xiao Pan Ding, Anders E. W. Jarfors, G.C. Lim et al. · Precision Engineering · 2011 · 54 citations

Materials Science, Materials Engineering, Engineering +9

A new method for deposition of cubic Ta diffusion barrier for Cu metallization

Zifeng Yuan, D.H. Zhang, C.Y. Li et al. · Thin Solid Films · 2003 · 47 citations

Materials Engineering, Materials Science, Engineering +10

Dielectric breakdown induced epitaxy in ultrathin gate oxide - a reliability concern

K. L. Pey, Ching‐Hsuan Tung, M. Radhakrishnan et al. · 2003 · 34 citations

Materials Engineering, Sbd Dbie, Electrical Engineering +15

Breakdowns in high-k gate stacks of nano-scale CMOS devices

K. L. Pey, Rakesh Ranjan, Ching‐Hsuan Tung et al. · Microelectronic Engineering · 2005 · 34 citations

Electrical Engineering, Engineering, Nanoelectronics +6