C.Y. Li is an author at Singapore Science Park specializing in applied physics, materials engineering, and engineering.
Top concepts
EngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceMaterials Engineering
Publications per year
2003–2003
1
1
A new method for deposition of cubic Ta diffusion barrier for Cu metallization
Zifeng Yuan, D.H. Zhang, C.Y. Li et al. · Thin Solid Films · 2003 · 47 citations
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