Concepedia

J. W. Shon

JW

11

Publications

657

Citations

10

H-Index

1995

Active since

Affiliations

Pohang University of Science and Technology(Current)

Lam Research (United States)

Jusung Engineering (South Korea)

Sungkyunkwan University

J. W. Shon is an author at Pohang University of Science and Technology specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceElectrical EngineeringPhysicsMaterial ScienceMicrofabricationChemical EngineeringElectrical InsulationAtomic Physics

Publications per year

1995–2010

11

Publications

11

Ion energy distribution control in single and dual frequency capacitive plasma sources

J. K. Lee, О.V. Manuilenko, Natalia Yu. Babaeva et al. · Plasma Sources Science and Technology · 2005 · 172 citations

Analytic model for a dual frequency capacitive discharge

H. C. Kim, J. K. Lee, J. W. Shon · Physics of Plasmas · 2003 · 129 citations · Full text

Electrical Engineering, Engineering, Bulk Plasma Length +12

Simulation of Capacitively Coupled Single- and Dual-Frequency RF Discharges

J.K. Lee, Natalia Yu. Babaeva, H.C. Kim et al. · IEEE Transactions on Plasma Science · 2004 · 104 citations

Electrical Engineering, Engineering, Radio Frequency +13

Sub-0.1 μm nitride hard mask open process without precuring the ArF photoresist

Jin Su Kim, Yun-Sook Chae, W. S. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 68 citations

Optical Materials, Engineering, Microscopy +18

Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model with experiment

Ellen Meeks, J. W. Shon, Y. Ra et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 43 citations

Radiation Chemistry, Chemical Engineering, Engineering +14

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