Concepedia

Y. Ra

YR

5

Publications

138

Citations

5

H-Index

1993

Active since

Affiliations

Lam Research (United States)(Current)

University of California, Irvine

Y. Ra is an author at Lam Research (United States) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPlasma ScienceMicroelectronicsChemical EngineeringHydrogenChemistryPlasma TheoryAtomic Physics

Publications per year

1993–2003

5

Publications

5

Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model with experiment

Ellen Meeks, J. W. Shon, Y. Ra et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 43 citations

Radiation Chemistry, Chemical Engineering, Engineering +14

Etching of aluminum alloys in the transformer-coupled plasma etcher

Y. Ra, Stephen G. Bradley, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 38 citations

Engineering, Radio Frequency, Plasma Physics +17

RF MEMS capacitive switches fabricated with HDICP CVD SiN/sub x/

C. H. Chang, Jun Qian, Bedri A. Cetiner et al. · 2003 · 25 citations

High Density, Electrical Engineering, Engineering +10

Direct current bias as an ion current monitor in the transformer coupled plasma etcher

Y. Ra, Ching-Hwa Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 19 citations

Electrical Engineering, Plasma Electronics, Engineering +11

Innovative nitride passivated pseudomorphicGaAs HEMTs

Yu-Ting Chou, R. Lai, G.P. Li et al. · IEEE Electron Device Letters · 2003 · 13 citations

Semiconductors, Semiconductor Technology, Chemical Engineering +12

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