Concepedia

H.-Y. Liu

HL

Statistics

Publications

2

Citations

60

H-Index

2

Active since

1995

Affiliations

Texas Instruments (United States)(Current)

H.-Y. Liu is an author at Texas Instruments (United States) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryThin FilmsSemiconductorsMicroelectronicsOptical MaterialsIntegrated Circuits

Publications per year

1995–2001

2

Publications

2

Novel high-yield trilayer resist process for 0.1 μm T-gate fabrication

A. S. Wakita, Chung‐Yi Su, Hans Rohdin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 46 citations

Engineering, Integrated Circuits, Silicon On Insulator +16

Characterization of silicon-rich nitride and oxynitride films for polysilicon gate patterning. I. Physical characterization

Eric Joseph, Carl Morris Gross, H.-Y. Liu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 14 citations

Silicon-rich Nitride, Optical Materials, Engineering +20

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