W. Kroll

High Quality P‐Type GaN Deposition on c‐Sapphire Substrates in a Multiwafer Rotating‐Disk Reactor

C. YUAN, T. Salagaj, A. Gurary et al. · Journal of The Electrochemical Society · 1995 · 45 citations

Engineering, Materials Engineering, Materials Science +17

Investigation of <i>n</i>- and <i>p</i>-type doping of GaN during epitaxial growth in a mass production scale multiwafer-rotating-disk reactor

Chris Yuan, T. Salagaj, A. Gurary et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 35 citations

Engineering, Materials Engineering, Materials Science +17

Large scale manufacturing of compound semiconductors by MOVPE

Alan Thompson, R. A. Stall, W. Kroll et al. · Journal of Crystal Growth · 1997 · 15 citations

Engineering, Manufacturing Engineering, Materials Science +11

Effect of shroud flow on high quality InxGa1−xN deposition in a production scale multi-wafer-rotating-disc reactor

C. YUAN, T. Salagaj, W. Kroll et al. · Journal of Electronic Materials · 1996 · 11 citations

Engineering, Manufacturing Engineering, Materials Engineering +4