Concepedia

Makiko Irie

MI

Statistics

Publications

4

Citations

66

H-Index

4

Active since

2006

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

Japan Synchrotron Radiation Research Institute

The University of Osaka

Makiko Irie is an author at Tokyo Ohka Kogyo (Japan) specializing in materials science, materials engineering, and thin films.

Publications per year

2006–2009

4

Publications

4

Changes of chemical nature of photoresists induced by various plasma treatments and their impact on LWR

Hiroichi Kawahira, Nobuyuki Matsuzawa, Eriko Matsui et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 27 citations

Engineering, Materials Engineering, Materials Science +16

Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films

Takehiro Fukuyama, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2009 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +13

Surface Property Control for 193nm Immersion Resist

Makiko Irie, Kotaro Endo, Takeshi Iwai · Journal of Photopolymer Science and Technology · 2006 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Effect of Polymer Protection and Film Thickness on Acid Generator Distribution in Chemically Amplified Resists

Takehiro Fukuyam, Takahiro Kozawa, Hiroki Yamamoto et al. · Journal of Photopolymer Science and Technology · 2009 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

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