Concepedia
Statistics
Publications
2
Citations
74
H-Index
Active since
2008
Affiliations
The University of Osaka(Current)
Japan Synchrotron Radiation Research Institute
Tokyo Ohka Kogyo (Japan)
Takehiro Fukuyama is an author at The University of Osaka specializing in microelectronics, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMaterials EngineeringThin FilmsPolymer ScienceMicrofabricationPolymer Chemistry
Publications per year
2008–2009
X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists
Takehiro Fukuyama, Takahiro Kozawa, Seiichi Tagawa et al. · Applied Physics Express · 2008 · 58 citations
Engineering, Electron-beam Lithography, Depth Profile +17
Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films
Takehiro Fukuyama, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2009 · 16 citations
Engineering, Electron-beam Lithography, Depth Profile +18
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