Statistics
Publications
3
Citations
158
H-Index
3
Active since
1998
Affiliations
Tokushima University(Current)
Shigeta Sakai is an author at Tokushima University specializing in applied physics, electrical engineering, and engineering.
Publications per year
1998–2000
3
3
Characterization of reactive ion etched surface of GaN using methane gas with chlorine plasma
Durga Basak, Q. Fareed, Katsushi Nishino et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 11 citations
Chemical Engineering, Electrical Engineering, Engineering +14
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