Concepedia
Statistics
Publications
3
Citations
32
H-Index
Active since
2001
Affiliations
MIT Lincoln Laboratory(Current)
Photronics (United States)
K Lab (United States)
Renee D. Mallen is an author at MIT Lincoln Laboratory specializing in mask fabrication, mask design, and photonics.
Publications per year
2001–2003
100-nm node lithography with KrF?
M. Fritze, Brian Tyrrell, David K. Astolfi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations
Engineering, Electrical Engineering, Nanotechnology +10
Gratings of regular arrays and trim exposures for ultralarge scale integrated circuit phase-shift lithography
M. Fritze, Brian Tyrrell, David K. Astolfi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 11 citations
Engineering, Electrical Engineering, Microfabrication +14
Dense only phase-shift template lithography
M. Fritze, Brian Tyrrell, Renee D. Mallen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
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