K. Torek - Concepedia

Author

K. Torek

Also Known As

K. J. Torek, K. TOREK, K. Torek, Kevin Torek

Publications

163

Citations

H-Index

Concepts

All Affiliations

K. Torek is an author at Pennsylvania State University specializing in engineering, materials science, and chemical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	140
2	Chemical Engineering	4	4	109
3	Applied Physics	3	3	61
4	Electrical Engineering	2	2	30
5	Chemistry	1	1	43

K. Torek

Publications

140

Citations

H-Index

Page 1

	Year	Citations
Reduced Pressure Etching of Thermal Oxides in Anhydrous HF / Alcoholic Gas Mixtures K. Torek, R. F. Grant, R. Novak Journal of The Electrochemical Society EngineeringMethanolExperimental ThermodynamicsThermal OxidesChemistry	1995	43
Etching of Thermal Oxides in Low Pressure Anhydrous HF / CH 3 OH Gas Mixture at Elevated Temperature K. Torek, C.R. Daffron, R. F. Grant, Journal of The Electrochemical Society Materials ScienceChemical EngineeringEngineeringMicrofabricationCombustion Science	1993	36
Etching mechanism of the single-step through-silicon-via dry etch using SF6/C4F8 chemistry Zihao Ouyang, D. N. Ruzic, Mark Kiehlbauch, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringSidewall SmoothnessPlasma PhysicsSilicon On InsulatorPlasma Processing	2014	31
Surface dopant concentration monitoring using noncontact surface charge profiling P. Roman, J. Staffa, S. Fakhouri, Journal of Applied Physics EngineeringCubic Boron NitrideChemical EngineeringBoron NitrideCorrosion	1998	17
In Situ Vapor Phase Pregate Oxide Cleaning and Its Effects on Metal‐Oxide‐Semiconductor Device Characteristics Yuhang Ma, M. L. Green, K. Torek, Journal of The Electrochemical Society Materials ScienceSemiconductor TechnologyElectrical EngineeringChemical EngineeringEngineering	1995	13

Page 1