Concepedia

Sang-Woo Kang

SK

4

Publications

90

Citations

4

H-Index

2002

Active since

Affiliations

Pohang University of Science and Technology(Current)

Sang-Woo Kang is an author at Pohang University of Science and Technology specializing in chemistry, thin films, and surface science.

Top concepts

Publications per year

2002–2004

4

Publications

4

Atomic layer deposition of zirconium silicate films using zirconium tetrachloride and tetra-<i>n</i>-butyl orthosilicate

Won-Kyu Kim, Sang-Woo Kang, Shi‐Woo Rhee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 29 citations

Infrared spectroscopic study of atomic layer deposition mechanism for hafnium silicate thin films using HfCl2[N(SiMe3)2]2 and H2O

Sang-Woo Kang, Shi‐Woo Rhee, Steven M. George · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 22 citations · Full text

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Direct liquid injection metal-organic chemical vapor deposition of HfO2 thin films using Hf(dimethylaminoethoxide)4

Moon‐Kyun Song, Sang-Woo Kang, Shi‐Woo Rhee · Thin Solid Films · 2004 · 20 citations

, , +8

Atomic layer deposition of zirconium silicate films using zirconium tetra-<i>tert</i>-butoxide and silicon tetrachloride

Won-Kyu Kim, Sang-Woo Kang, Shi‐Woo Rhee · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 19 citations · Full text

, , +14

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