Concepedia

Won-Kyu Kim

WK

2

Publications

54

Citations

2

H-Index

2003

Active since

Affiliations

Pohang University of Science and Technology(Current)

Won-Kyu Kim is an author at Pohang University of Science and Technology specializing in applied physics, thin films, and materials engineering.

Top concepts

ChemistryThin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials Engineering

Publications per year

2003–2004

2

Publications

2

Atomic layer deposition of hafnium silicate films using hafnium tetrachloride and tetra-n-butyl orthosilicate

Won-Kyu Kim, Shi‐Woo Rhee, Nae-In Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 35 citations · Full text

Materials Science, Materials Engineering, Engineering +13

Atomic layer deposition of zirconium silicate films using zirconium tetra-<i>tert</i>-butoxide and silicon tetrachloride

Won-Kyu Kim, Sang-Woo Kang, Shi‐Woo Rhee · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 19 citations · Full text

Materials Science, Materials Engineering, Zirconium Silicate Films +14

Rows per page

1–2 of 2