Concepedia

Moon‐Kyun Song

MS

6

Publications

97

Citations

6

H-Index

2004

Active since

Affiliations

Pohang University of Science and Technology(Current)

Moon‐Kyun Song is an author at Pohang University of Science and Technology specializing in chemistry, surface science, and thin films.

Top concepts

Publications per year

2004–2010

6

Publications

6

Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia

Moon‐Kyun Song, Shi‐Woo Rhee · Journal of The Electrochemical Society · 2008 · 28 citations · Full text

Direct liquid injection metal-organic chemical vapor deposition of HfO2 thin films using Hf(dimethylaminoethoxide)4

Moon‐Kyun Song, Sang-Woo Kang, Shi‐Woo Rhee · Thin Solid Films · 2004 · 20 citations

, , +8

Growth of Hafnium Aluminate Thin Films by Direct Liquid Injection Metallorganic CVD Using Hf [N(C[sub 2]H[sub 5])[sub 2]][sub 4] and Al(O[sup i]C[sub 3]H[sub 7])[sub 3]

Moon‐Kyun Song, Sang‐Woo Kang, Shi‐Woo Rhee · Journal of The Electrochemical Society · 2005 · 13 citations · Full text

Direct liquid injection metal organic chemical vapor deposition of Nd2O3 thin films using Tris(2,2,6,6-tetramethyl-3,5-heptanedionato) neodymium

Moon‐Kyun Song, Shi‐Woo Rhee · Thin Solid Films · 2005 · 13 citations

, , +8

Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and <i>tert</i>‐Butylimido‐tris(diethylamido)‐tantalum (TBTDET), and its Effect on Material Properties

Moon‐Kyun Song, Shi‐Woo Rhee · Chemical Vapor Deposition · 2008 · 12 citations

, , +17

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