Filippos Papadatos

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Active since

2004

Affiliations

University at Albany, State University of New York(Current)

Filippos Papadatos is an author at University at Albany, State University of New York specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringThin FilmsNanoelectronicsMaterial ScienceMicroelectronicsMaterials Engineering

Publications per year

2004–2011

Publications

Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications

Filippos Papadatos, Steven Consiglio, Spyridon Skordas et al. · Journal of materials research/Pratt's guide to venture capital sources · 2004 · 15 citations

Electrical Engineering, Engineering, Oxide Electronics +7

Low resistivity tungsten for 32nm node MOL contacts and beyond

Filippos Papadatos, Keith H.K. Wong, V. Arunachalam et al. · Microelectronic Engineering · 2011 · 15 citations

Materials Science, Materials Engineering, Electrical Engineering +9

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