Concepedia

S. S. Cooperman

SS

Statistics

Publications

3

Citations

45

H-Index

3

Active since

1989

Affiliations

Massachusetts Institute of Technology(Current)

Digital Wave (United States)

S. S. Cooperman is an author at Massachusetts Institute of Technology specializing in engineering, electrical engineering, and microelectronics.

Top concepts

Publications per year

1989–1995

3

Publications

3

Optimization of a Shallow Trench Isolation Process for Improved Planarization

S. S. Cooperman, Al-Jafai Nasr, G.J. Grula · Journal of The Electrochemical Society · 1995 · 18 citations

, , +13

Reactive ion etching of GaAs and AlGaAs in a BCl3–Ar discharge

S. S. Cooperman, Hyejin Choi, Herbert H. Sawin et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 16 citations

, , +13

Reliability of Interconnects Exhibiting Bimodal Electromigration-Induced Failure Distributions

Howard Kahn, Carl V. Thompson, S. S. Cooperman · MRS Proceedings · 1992 · 11 citations

, , +7

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