Lalitha Parameswaran

A merged MEMS-CMOS process using silicon wafer bonding

Lalitha Parameswaran, Chao-Ming Hsu, M.A. Schmidt · 2002 · 41 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Design, simulation, and fabrication of three-dimensional microsystem components using grayscale photolithography

Melissa Smith, Shaun Berry, Lalitha Parameswaran et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 34 citations · Full text

Engineering, Manufacturing Engineering, Microelectromechanical Systems +14

Nonreciprocal acoustoelectric interaction of surface waves and fluorine plasma-treated AlGan/GaN 2DEG

Siddhartha Ghosh, Timothy Hancock, Matthew Storey et al. · 2017 · 12 citations

Engineering, Electrical Engineering, Materials Science +17

Nano-additively manufactured gold thin films with high adhesion and near-bulk electrical resistivity via jet-assisted, nanoparticle-dominated, room-temperature microsputtering

Yosef Kornbluth, R.H. Mathews, Lalitha Parameswaran et al. · Additive manufacturing · 2020 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

15.1 A Self-Powered SoC with Distributed Cooperative Energy Harvesting and Multi-Chip Power Management for System-in-Fiber

Xinjian Liu, Daniel S. Truesdell, Omar Faruqe et al. · 2023 · 12 citations

Engineering, Biomedical Engineering, Systems Engineering +17