P. P. Mulgrew

Characterization of near-field holography grating masks for optoelectronics fabricated by electron beam lithography

D. M. Tennant, T. L. Koch, P. P. Mulgrew et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 49 citations

Engineering, Materials Engineering, Materials Science +17

Design and fabrication of high-efficiency beam splitters and beam deflectors for integrated planar micro-optic systems

Susan J. Walker, J. Jahns, Leo Li et al. · Applied Optics · 1993 · 44 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

89-GHz f/sub T/ room-temperature silicon MOSFETs

Ran Yan, K.F. Lee, Dae‐Young Jeon et al. · IEEE Electron Device Letters · 1992 · 28 citations

Engineering, Electrical Engineering, Microelectronics +14

High performance 0.1- mu m room temperature Si MOSFETs

Ran Yan, K.F. Lee, Dae‐Young Jeon et al. · 2003 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

Characterization of AZ PN114 resist for high resolution using electron-beam and soft-x-ray projection lithographies

K. Early, D. M. Tennant, Dae‐Young Jeon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +13