Takanori Nishi is an author at Tokyo Electron (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationSelf-assemblyNanofabricationBatteriesChemistry3D PrintingData Modeling
Publications per year
2014–2017
4
4
High-volume manufacturing equipment and processing for directed self-assembly applications
Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations
Engineering, Electron-beam Lithography, Pattern Transfer +18
Rows per page
1–4 of 4