Marco Puglisi - Concepedia

Author

Marco Puglisi

Institute for Microelectronics and Microsystems

Also Known As

M. Puglisi, Marco Puglisi

Publications

Citations

H-Index

Concepts

All Affiliations

Institute for Microelectronics and Microsystems ETH Zurich University of Milano-Bicocca Masaryk University

About

Marco Puglisi is an author at Institute for Microelectronics and Microsystems specializing in applied physics, materials engineering, and engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	69
2	Applied Physics	5	5	69
3	Materials Engineering	5	5	69
4	Materials Science	4	4	52
5	Electrical Engineering	2	2	30

Marco Puglisi

Publications

Citations

H-Index

Page 1

	Year	Citations
4H-SiC Epitaxial Layer Grown on 150 mm Automatic Horizontal Hot Wall Reactor PE106 Marco Mauceri, Antonino Pecora, Grazia Litrico, Materials science forum Materials EngineeringNuclear CeramicElectrical EngineeringEngineeringApplied Physics	2014	17
(Invited) Three-Dimensional Epitaxial Si<sub>1-X</sub>Ge<sub>x</sub>, Ge and SiC Crystals on Deeply Patterned Si Substrates H. von Känel, Fabio Isa, C.V. Falub, ECS Transactions EngineeringDeep Substrate PatterningGeometric ShieldingSilicon On InsulatorSemiconductors	2014	16
Defect Reduction in Epitaxial 3C-SiC on Si(001) and Si(111) by Deep Substrate Patterning H. von Känel, Leo Miglio, Danilo Crippa, Materials science forum Materials EngineeringMaterials ScienceElectrical EngineeringEpitaxial GrowthEngineering	2015	13
3C-SiC Epitaxy on Deeply Patterned Si(111) Substrates Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Materials science forum Materials ScienceMaterials EngineeringSi PillarsEngineeringNanoelectronics	2016	12
Stacking Fault Analysis of Epitaxial 3C-SiC on Si(001) Ridges Mojmír Meduňa, Thomas Kreiliger, Iván Prieto, Materials science forum Materials EngineeringMaterials ScienceEpitaxial GrowthEngineeringPhysics	2016	11

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