I. A. Kas’kov

High-performance facility and techniques for high-precision machining of optical components by ion beams

I. A. Kas’kov, М. S. Mikhaylenko, I. G. Zabrodin · Precision Engineering · 2017 · 75 citations

Ion Implantation, Engineering, Target Fabrication +7

Ultrathin film deposition by pulsed laser ablation using crossed beams

A.A. Gorbunov, W. Pompe, A. Sewing et al. · Applied Surface Science · 1996 · 48 citations

Materials Science, Advanced Laser Processing, Engineering +6

Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results

I. G. Zabrodin, S. Yu. Zuev, I. A. Kas’kov et al. · Quantum Electronics · 2017 · 25 citations

Laboratory Reflectometer, Optical Materials, Engineering +27

High-resolution laboratory reflectometer for the study of x-ray optical elements in the soft and extreme ultraviolet wavelength ranges

I. A. Kas’kov, A. Ya. Lopatin, A. N. Nechay et al. · Review of Scientific Instruments · 2020 · 24 citations

Short Wavelength Optic, Optical Materials, X-ray Spectroscopy +26

A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov et al. · Bulletin of the Russian Academy of Sciences Physics · 2011 · 20 citations