Concepedia
1
Publications
20
Citations
H-Index
2011
Active since
Affiliations
Russian Academy of Sciences(Current)
D. G. Volgunov is an author at Russian Academy of Sciences.
Publications per year
2011–2011
A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm
D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov et al. · Bulletin of the Russian Academy of Sciences Physics · 2011 · 20 citations
Rows per page
1–1 of 1