Concepedia

Akitsu Shigetou

AS

Statistics

Publications

26

Citations

767

H-Index

15

Active since

2002

Affiliations

National Institute for Materials Science(Current)

The University of Tokyo

Waseda University

Bunkyo University

Nissan Chemical Corporation (Japan)

Akitsu Shigetou is an author at National Institute for Materials Science specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceElectronic PackagingMaterials EngineeringMicrofabricationChemistryMicroelectronicsElectrical Engineering

Publications per year

2002–2021

26

Publications

26

Bumpless Interconnect Through Ultrafine Cu Electrodes by Means of Surface-Activated Bonding (SAB) Method

Akitsu Shigetou, Toshihiro Itoh, M. Matsuo et al. · IEEE Transactions on Advanced Packaging · 2006 · 143 citations

Engineering, Cu Electrodes, Interconnect (Integrated Circuits) +19

Direct bonding of CMP-Cu films by surface activated bonding (SAB) method

Akitsu Shigetou, Toshihiro Itoh, Tadatomo Suga · Journal of Materials Science · 2005 · 87 citations

Materials Science, Materials Engineering, Surface Characterization +8

Bumpless Interconnect of 6-$\mu$m-Pitch Cu Electrodes at Room Temperature

Akitsu Shigetou, Toshihiro Itoh, K. Sawada et al. · IEEE Transactions on Advanced Packaging · 2008 · 80 citations

Materials Science, Room Temperature, Electrical Engineering +14

Synchronously wired infrared antennas for resonant single-quantum-well photodetection up to room temperature

Hideki T. Miyazaki, Takaaki Mano, Takeshi Kasaya et al. · Nature Communications · 2020 · 65 citations · Full text

Near-field resonant photon sorting applied: dual-band metasurface quantum well infrared photodetectors for gas sensing

Mel F. Hainey, Takaaki Mano, Takeshi Kasaya et al. · Nanophotonics · 2020 · 30 citations · Full text

Photonic Sensor, Quantum Photonics, Optical Materials +18

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