Takashi Namura

Experimental and Theoretical Study of the Charge Build-Up in an ECR Etcher

Takashi Namura, Hiroyuki Okada, Yasushi Naitoh et al. · Japanese Journal of Applied Physics · 1990 · 26 citations

Natural Sciences, Electrical Engineering, Physics +13

Charge Buildup in Magnetized Process Plasma

Takashi Namura, Hiroyuki Okada, Yasushi Naitoh et al. · Japanese Journal of Applied Physics · 1991 · 23 citations

Natural Sciences, Electrical Engineering, Physics +11

Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

Takashi Namura, Ichio Arikata, Osamu Fukumasa et al. · Review of Scientific Instruments · 1992 · 12 citations · Full text

Natural Sciences, Physics, Antennas +11

Charge Build-Up and Uniformity Control in Magnetically Enhanced Reactive Ion Etching Using a Curved Lateral Magnetic Field

Satoshi Nakagawa, Tomoyuki Sasaki Tomoyuki Sasaki, Hajime Mori Hajime Mori et al. · Japanese Journal of Applied Physics · 1994 · 11 citations

Natural Sciences, Physics, Electromagnetism +14

Detailed measurements and simplified modeling of wafer charging in different barrel reactor configurations

Takashi Namura, Hirofumi Uchida, Yoshihiro Todokoro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 11 citations

Engineering, Electrical Engineering, Physics +17