S. Pauliac-Vaujour

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Active since

2007

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

CEA Grenoble

Université Grenoble Alpes

Institut polytechnique de Grenoble

S. Pauliac-Vaujour is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in engineering, materials science, and amorphous carbon.

Publications per year

2007–2010

Publications

Improvement of high resolution lithography by using amorphous carbon hard mask

S. Pauliac-Vaujour, P. Brianceau, C. Comboroure et al. · Microelectronic Engineering · 2008 · 35 citations

Engineering, Materials Engineering, Materials Science +8

Single dopant impact on electrical characteristics of SOI NMOSFETs with effective length down to 10nm

R. Wacquez, M. Vinet, M. Pierre et al. · 2010 · 20 citations

Engineering, Electrical Engineering, Physics +10

Sub-30-nm hybrid lithography (electron beam∕deep ultraviolet) and etch process for fully depleted metal oxide semiconductor transistors

S. Pauliac-Vaujour, P. Brianceau, S. Landis et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 12 citations

Engineering, Electrical Engineering, Materials Science +17

Hybrid high resolution lithography (e-beam/deep ultraviolet) and etch process for the fabrication of stacked nanowire metal oxide semiconductor field effect transistors

S. Pauliac-Vaujour, C. Comboroure, C. Vizioz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 10 citations

Engineering, Electrical Engineering, Materials Science +17

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