Katharina Baur

Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces

P. Pianetta, Katharina Baur, Anoop Pratap Singh et al. · Thin Solid Films · 2000 · 40 citations

Engineering, Electrical Engineering, Materials Science +17

Aluminum impurities in silicon: Investigation of x-ray Raman scattering in total reflection x-ray fluorescence spectroscopy

Katharina Baur, Jonathan A. Kerner, S. Brennan et al. · Journal of Applied Physics · 2000 · 23 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Laboratory and synchrotron radiation total-reflection X-ray fluorescence: new perspectives in detection limits and data analysis

Katharina Baur, S. Brennan, B Burrow et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2001 · 19 citations

Natural Sciences, Chemistry, Radiation Detection +16

Analysis of low Z elements on Si wafer surfaces with synchrotron radiation induced total reflection X-ray fluorescence at SSRL, Beamline 3-3: comparison of droplets with spin coated wafers

Christina Streli, G. Pepponi, P. Wobrauschek et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2003 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +16

Peer Reviewed: Looking at Trace Impurities on Silicon Wafers with Synchrotron Radiation

Katharina Baur, S. Brennan, P. Pianetta et al. · Analytical Chemistry · 2002 · 18 citations · Full text

Natural Sciences, Chemistry, Materials Science +15