Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces - Concepedia

Concepedia

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Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces

40

Citations

7

References

2000

Year

P. Pianetta, Katharina Baur, Anoop Pratap Singh, S. Brennan, Jonathan A. Kerner, D. Werho, J Wang

Thin Solid Films

Electrical EngineeringSynchrotron RadiationEngineeringRadiation DetectionSynchrotron Radiation ResearchCorrosionSilicon DebuggingSurface AnalysisApplied PhysicsSemiconductor Device FabricationElectronic PackagingInstrumentationMicroelectronicsSilicon Wafer SurfacesTxrf AnalysisElectromagnetic Compatibility

References

	Year	Citations

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