Concepedia

Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces

P. Pianetta, Katharina Baur, Anoop Pratap Singh, S. Brennan, Jonathan A. Kerner, D. Werho, J Wang

Thin Solid Films · 2000 · 40 citations · 7 references

DOI

Concepts

References

7

Materials Research Society

Rustum Roy, H. J. Leamy, C. W. White et al. · Physics Today · 1984 · 1K citations

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Inelastic Resonance Emission of X Rays: Anomalous Scattering Associated with Anomalous Dispersion

C. J. Sparks · Physical Review Letters · 1974 · 197 citations

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X-Ray Resonant Raman Scattering: Observation of Characteristic Radiation Narrower than the Lifetime Width

P. Eisenberger, P. M. Platzman, Herman Winick · Physical Review Letters · 1976 · 188 citations

, , +9

Applications of synchrotron radiation techniques to materials science III

L. J. Terminello, N. D. Shinn, Gene E. Ice et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1994 · 85 citations

, , +16

Total reflection x-ray fluorescence spectroscopy using synchrotron radiation for wafer surface trace impurity analysis (invited)

P. Pianetta, N. Takaura, S. Brennan et al. · Review of Scientific Instruments · 1995 · 44 citations

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