G. Gautherin

Some trends in preparing film structures by ion beam methods

G. Gautherin, Chr. Weißmantel · Thin Solid Films · 1978 · 75 citations

Materials Science, Ion Implantation, Engineering +8

Epitaxial growth of yttria-stabilized zirconia films on silicon by ultrahigh vacuum ion beam sputter deposition

P. Legagneux, G. Garry, D. Dieumegard et al. · Applied Physics Letters · 1988 · 66 citations · Full text

Materials Engineering, Materials Science, Engineering +14

Characterization and growth mechanisms of boron nitride films synthesized by ion-beam-assisted deposition

O. Burat, D. Bouchier, Valérie Stambouli et al. · Journal of Applied Physics · 1990 · 63 citations

Engineering, Surface Boron Atoms, Vacuum Device +18

Growth of silicon homoepitaxial thin films by ultrahigh vacuum ion beam sputter deposition

C. Schwebel, F. Meyer, G. Gautherin et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 46 citations

Materials Science, Engineering, Crystalline Defects +13

Cleaning of Si and GaAs Crystal Surfaces by Ion Bombardment in the 50–1500 eV Range: Influence of Bombarding Energy and Sample Temperature on Damage and Incorporation

Patrick Rabinzohn, G. Gautherin, B. Agius et al. · Journal of The Electrochemical Society · 1984 · 42 citations

Materials Science, Electrical Engineering, Ion Implantation +14