Concepedia

Takeshi Maruoka

TM

8

Publications

203

Citations

8

H-Index

2009

Active since

Affiliations

Kanazawa Institute of Technology(Current)

The University of Osaka

Osaka Research Institute of Industrial Science and Technology

Shizuoka University

Takeshi Maruoka is an author at Kanazawa Institute of Technology specializing in engineering, materials science, and chemical engineering.

Top concepts

EngineeringMaterial ScienceHydrogenChemistryChemical EngineeringPhotocatalysisPhotochemistryHealthOzoneCatalysis

Publications per year

2009–2011

8

Publications

8

Substrate Temperature Dependence of the Photoresist Removal Rate Using Atomic Hydrogen Generated by a Hot-Wire Tungsten Catalyst

Masashi Yamamoto, Takeshi Maruoka, Akihiko Kono et al. · Japanese Journal of Applied Physics · 2010 · 43 citations

Engineering, Energy Conversion, Photo-electrochemical Cell +16

Removal of Ion-Implanted Photoresists Using Atomic Hydrogen

Masashi Yamamoto, Takeshi Maruoka, Yousuke Goto et al. · Journal of The Electrochemical Society · 2010 · 35 citations

Engineering, Acceleration Energy, Photo-electrochemical Cell +16

Order of Reaction between Photoresist and Atomic Hydrogen Generated by a Tungsten Hot-Wire Catalyst

Masashi Yamamoto, Takeshi Maruoka, Akihiko Kono et al. · Applied Physics Express · 2010 · 33 citations

Engineering, Chemistry, Hydrogen Generation +16

Relationship between the Thermal Hardening of Ion-Implanted Resist and the Resist Removal Using Atomic Hydrogen

Takeshi Maruoka, Yousuke Goto, Masashi Yamamoto et al. · Journal of Photopolymer Science and Technology · 2009 · 29 citations · Full text

Materials Engineering, Materials Science, Electrical Engineering +14

Effect of cooling rate after polymer melting on electrical properties of high-density polyethylene/Ni composites

Akihiko Kono, Naoko Miyakawa, Satoshi Kawadai et al. · Polymer Journal · 2010 · 18 citations · Full text

Materials Science, Electrical Engineering, Engineering +11

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