5
Publications
186
Citations
5
H-Index
1991
Active since
Affiliations
Akiko Nara is an author at International Superconductivity Technology Center specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsCondensed Matter PhysicsMicroelectronicsElectrical InsulationElectrical EngineeringPhysicsChemistryThin Films
Publications per year
1991–2002
5
5
Akiko Nara, Naoki Yasuda, Hideki Satake et al. · IEEE Transactions on Semiconductor Manufacturing · 2002 · 60 citations
Engineering, Ultrathin Gate Oxide, Dielectric Layer Thickness +18
Rows per page
1–5 of 5