Concepedia

E. F. Gorey

EF

Statistics

Publications

5

Citations

128

H-Index

5

Active since

1970

Affiliations

IBM (United States)(Current)

United States Air Force Research Laboratory

E. F. Gorey is an author at IBM (United States) specializing in applied physics, engineering, and crystalline defects.

Top concepts

EngineeringApplied PhysicsPhysicsCrystalline DefectsMaterial ScienceIntegrated CircuitsEducationThin FilmsCalibrationMeasurement

Publications per year

1970–1982

5

Publications

5

Proton-enhanced diffusion and vacancy migration in silicon

B. J. Masters, E. F. Gorey · Journal of Applied Physics · 1978 · 70 citations

Materials Science, Ion Implantation, Phosphorus Profiles +12

Pulsed ion beam irradiation of silicon

Wei-Kan Chu, Sebastian Mäder, E. F. Gorey et al. · Nuclear Instruments and Methods in Physics Research · 1982 · 20 citations

Ion Beam, Ion Implantation, Applied Physics +1

Resistivity and annealing properties of implanted Si:H<sup>+</sup>

G. H. Schwuttke, K. Brack, E. F. Gorey et al. · Radiation Effects · 1970 · 16 citations

Materials Engineering, Electrical Engineering, Ion Implantation +12

Apparatus for the Measurement of Small Angles

Anshi Tong, E. F. Gorey, Christian Schneider · Review of Scientific Instruments · 1972 · 12 citations

Small Angles, Precision Measurement, Silicon Wafers +10

Formation and annealing of isolation regions in silicon through Si+ bombardment

G. H. Schwuttke, K. Brack, E. F. Gorey et al. · physica status solidi (a) · 1972 · 10 citations

Engineering, Integrated Circuits, Silicon On Insulator +18

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