Pulsed ion beam irradiation of silicon

Nonthermal pulsed laser annealing of Si; plasma annealing

J. A. Van Vechten, Raphael Tsu, F.W. Saris · Physics Letters A · 1979 · 285 citations

Natural Sciences, Materials Science, Physics +12

Raman Measurement of Lattice Temperature during Pulsed Laser Heating of Silicon

H. W. Lo, A. Compaan · Physical Review Letters · 1980 · 207 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reasons to believe pulsed laser annealing of Si does not involve simple thermal melting

J. A. Van Vechten, Raphael Tsu, F.W. Saris et al. · Physics Letters A · 1979 · 161 citations

Engineering, Materials Engineering, Materials Science +12

Arsenic diffusion in silicon melted by high-power nanosecond laser pulsing

P. Baeri, S. U. Campisano, G. Fóti et al. · Applied Physics Letters · 1978 · 133 citations

Engineering, Materials Engineering, Materials Science +17

Ion beam annealing of semiconductors

R. T. Hodgson, J. E. E. Baglin, Rikathi Pal et al. · Applied Physics Letters · 1980 · 106 citations

Engineering, Materials Engineering, Materials Science +12