Nonthermal pulsed laser annealing of Si; plasma annealing - Concepedia

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Nonthermal pulsed laser annealing of Si; plasma annealing

282

Citations

22

References

1979

Year

J. A. Van Vechten, Raphael Tsu, F.W. Saris

Physics Letters A

EngineeringLaser-induced BreakdownPlasma AnnealingApplied PhysicsLaser-assisted DepositionPulsed Laser Deposition

References

	Year	Citations

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