J. Sachitano

Effects of ion implantation doping on the formation of TiSi2

H. K. Park, J. Sachitano, M. McPherson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 76 citations

Materials Science, Semiconductors, Materials Engineering +14

High-speed polysilicon emitter—base bipolar transistor

H.K. Park, K. Boyer, C. W. Clawson et al. · IEEE Electron Device Letters · 1986 · 40 citations

Semiconductor Technology, Electrical Engineering, Electronic Devices +12

MO/Ti bilayer metallization for a self-aligned TiSi2 process

H. K. Park, J. Sachitano, Gregory C. Eiden et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 23 citations

Materials Engineering, Semiconductors, Materials Science +14

Inversion-mode MOSFET's in polycrystalline Silicon thin films: Characterization and modeling

Qian Feng, D.M. Kim, Hee Kyun Park et al. · IEEE Transactions on Electron Devices · 1987 · 21 citations

Device Modeling, Electrical Engineering, Engineering +10

An advanced MOS-IC process technology using local oxidation ot oxygen-doped polysilicon films

T. Yamaguchi, K. L. Seaward, J. Sachitano et al. · IEEE Journal of Solid-State Circuits · 1978 · 12 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +16