Ludovic Lattard

Publications

Citations

H-Index

2012

Active since

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Ludovic Lattard is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in applied physics, microfabrication, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationBusinessMicroscopy3D PrintingInstrumentationNanoelectronicsOptoelectronics

Publications per year

2012–2015

Publications

Ready for multi-beam exposure at 5kV on MAPPER tool: lithographic and process integration performances of advanced resists/stack

Isabelle Servin, Ndeye Thiam, Patricia Pimenta‐Barros et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 16 citations

Engineering, Electron-beam Lithography, Target Fabrication +18

Spacer process and alignment assessment for SADP process

Ludovic Lattard, Martin McCallum, Robert D. Morton et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +21

Rows per page

1–2 of 2