Concepedia

Robert D. Morton

RD

3

Publications

108

Citations

3

H-Index

1978

Active since

Affiliations

Philips (Belgium)(Current)

Robert D. Morton is an author at Philips (Belgium) specializing in engineering, applied physics, and computer engineering.

Top concepts

Publications per year

1978–2012

3

Publications

3

Distributional Weight Functions for Orthogonal Polynomials

Robert D. Morton, Allan M. Krall · SIAM Journal on Mathematical Analysis · 1978 · 85 citations

, , +8

Spacer process and alignment assessment for SADP process

Ludovic Lattard, Martin McCallum, Robert D. Morton et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 12 citations

, , +21

Improved wafer stepper alignment performance using an enhanced phase grating alignment system

Jaap H. M. Neijzen, Robert D. Morton, Peter Dirksen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

, , +6

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