Concepedia

Akshay Sahota

AS

Statistics

Publications

6

Citations

126

H-Index

6

Active since

2020

Affiliations

Kangwon National University(Current)

The University of Texas at Dallas

Hanyang University

Inha University

DuPont (United States)

Akshay Sahota is an author at Kangwon National University specializing in materials engineering, materials science, and natural sciences.

Publications per year

2020–2022

6

Publications

6

A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films

Si Joon Kim, Jaidah Mohan, Harrison Sejoon Kim et al. · Materials · 2020 · 51 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Robust low-temperature (350 °C) ferroelectric Hf0.5Zr0.5O2 fabricated using anhydrous H2O2 as the ALD oxidant

Yong Chan Jung, Jin-Hyun Kim, Jin-Hyun Kim et al. · Applied Physics Letters · 2022 · 21 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiN<i><sub>x</sub></i> Films Using Trichlorodisilane for Etch-Resistant Coatings

Su Min Hwang, Harrison Sejoon Kim, Dan N. Le et al. · ACS Applied Nano Materials · 2021 · 15 citations

Engineering, Materials Engineering, Materials Science +17

Relaxation Induced by Imprint Phenomena in Low-Temperature (400 °C) Processed Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>-Based Metal-Ferroelectric-Metal Capacitors

Jaidah Mohan, Yong Chan Jung, Heber Hernandez‐Arriaga et al. · ACS Applied Electronic Materials · 2022 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17

High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor

Harrison Sejoon Kim, Su Min Hwang, Xin Meng et al. · Journal of Materials Chemistry C · 2020 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

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