Dan N. Le - Concepedia

Author

Dan N. Le

Also Known As

Dan N. Le, Dushyant M. Narayan, Jin-Hyun Kim, Su Min Hwang, Yong Chan Jung

Publications

160

Citations

H-Index

Concepts

All Affiliations

Dan N. Le is an author at The University of Texas at Dallas specializing in materials science, applied physics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	45
2	Applied Physics	3	3	45
3	Chemical Engineering	1	1	14
4	Chemistry	1	1	19
5	Electrical Engineering	1	1	12

Dan N. Le

Publications

Citations

H-Index

Page 1

	Year	Citations
Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source Yong Chan Jung, Su Min Hwang, Dan N. Le, Materials	2020	20
Atomic layer deposition and its derivatives for extreme ultraviolet (EUV) photoresist applications Dan N. Le, Taehee Park, Su Min Hwang, Japanese Journal of Applied Physics Optical MaterialsEngineeringElectron-beam LithographyPhotolithography WavelengthOptoelectronic Devices	2023	19
Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiN<i><sub>x</sub></i> Films Using Trichlorodisilane for Etch-Resistant Coatings Su Min Hwang, Harrison Sejoon Kim, Dan N. Le, ACS Applied Nano Materials Etch-resistant CoatingsEngineeringChemical DepositionPlasma ProcessingSurface Technology	2021	14
Relaxation Induced by Imprint Phenomena in Low-Temperature (400 °C) Processed Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>-Based Metal-Ferroelectric-Metal Capacitors Jaidah Mohan, Yong Chan Jung, Heber Hernandez‐Arriaga, ACS Applied Electronic Materials EngineeringMetal-ferroelectric-metal CapacitorsFerroelectric Random-access MemoryPolarization RelaxationMultiferroics	2022	12
BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 nm Ferroelectric HZO Capacitors Minjong Lee, Jin-Hyun Kim, Dan N. Le,	2024	10

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