Concepedia

Dan N. Le

DN

5

Publications

75

Citations

5

H-Index

2020

Active since

Affiliations

The University of Texas at Dallas(Current)

Kangwon National University

Inha University

Hanyang University

Dan N. Le is an author at The University of Texas at Dallas specializing in materials science, applied physics, and engineering.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceSurface ScienceSolar Cell MaterialsChemistryMultiferroicsNanotechnologyPhotochemistry

Publications per year

2020–2024

5

Publications

5

Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source

Yong Chan Jung, Su Min Hwang, Dan N. Le et al. · Materials · 2020 · 20 citations · Full text

Atomic layer deposition and its derivatives for extreme ultraviolet (EUV) photoresist applications

Dan N. Le, Taehee Park, Su Min Hwang et al. · Japanese Journal of Applied Physics · 2023 · 19 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +23

Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiN<i><sub>x</sub></i> Films Using Trichlorodisilane for Etch-Resistant Coatings

Su Min Hwang, Harrison Sejoon Kim, Dan N. Le et al. · ACS Applied Nano Materials · 2021 · 14 citations

Etch-resistant Coatings, Engineering, Chemical Deposition +18

Relaxation Induced by Imprint Phenomena in Low-Temperature (400 °C) Processed Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>-Based Metal-Ferroelectric-Metal Capacitors

Jaidah Mohan, Yong Chan Jung, Heber Hernandez‐Arriaga et al. · ACS Applied Electronic Materials · 2022 · 12 citations

Engineering, Metal-ferroelectric-metal Capacitors, Ferroelectric Random-access Memory +16

BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 nm Ferroelectric HZO Capacitors

Minjong Lee, Jin-Hyun Kim, Dan N. Le et al. · 2024 · 10 citations

Rows per page

1–5 of 5