Concepedia

Su Min Hwang

SM

16

Publications

312

Citations

12

H-Index

2008

Active since

Affiliations

Inha University(Current)

The University of Texas at Dallas

Kangwon National University

Hanyang University

Kookmin University

Su Min Hwang is an author at Inha University specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

2008–2023

16

Publications

16

A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf0.5Zr0.5O2 Thin Films

Si Joon Kim, Jaidah Mohan, Harrison Sejoon Kim et al. · Materials · 2020 · 48 citations · Full text

Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper

Harrison Sejoon Kim, Xin Meng, Si Joon Kim et al. · ACS Applied Materials & Interfaces · 2018 · 35 citations

Effect of hydrogen derived from oxygen source on low-temperature ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors

Si Joon Kim, Jaidah Mohan, Harrison Sejoon Kim et al. · Applied Physics Letters · 2019 · 34 citations

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Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

Xin Meng, Harrison Sejoon Kim, Antonio T. Lucero et al. · ACS Applied Materials & Interfaces · 2018 · 29 citations

Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source

Yong Chan Jung, Su Min Hwang, Dan N. Le et al. · Materials · 2020 · 20 citations · Full text

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