Concepedia

Takashi Onaya

TO

14

Publications

410

Citations

12

H-Index

2016

Active since

Affiliations

National Institute for Materials Science(Current)

Meiji University

Japan Society for the Promotion of Science

The University of Texas at Dallas

Kangwon National University

Takashi Onaya is an author at National Institute for Materials Science specializing in applied physics, engineering, and materials science.

ORCID

Top concepts

Publications per year

2016–2022

14

Publications

14

Improvement in ferroelectricity of Hf<i><sub>x</sub></i>Zr<sub>1−</sub><i><sub>x</sub></i>O<sub>2</sub>thin films using ZrO<sub>2</sub>seed layer

Takashi Onaya, Toshihide Nabatame, Naomi Sawamoto et al. · Applied Physics Express · 2017 · 98 citations

, , +10

Ferroelectricity of HfxZr1−xO2 thin films fabricated by 300 °C low temperature process with plasma-enhanced atomic layer deposition

Takashi Onaya, Toshihide Nabatame, Naomi Sawamoto et al. · Microelectronic Engineering · 2019 · 73 citations

, , +8

Wake-up-free properties and high fatigue resistance of Hf<i>x</i>Zr1−<i>x</i>O2-based metal–ferroelectric–semiconductor using top ZrO2 nucleation layer at low thermal budget (300 °C)

Takashi Onaya, Toshihide Nabatame, Mari Inoue et al. · APL Materials · 2022 · 39 citations · Full text

, , +13

Improvement in ferroelectricity and breakdown voltage of over 20-nm-thick HfxZr1−xO2/ZrO2 bilayer by atomic layer deposition

Takashi Onaya, Toshihide Nabatame, Mari Inoue et al. · Applied Physics Letters · 2020 · 33 citations

, , +13

Ferroelectric polarization retention with scaling of Hf0.5Zr0.5O2 on silicon

Jaidah Mohan, Heber Hernandez‐Arriaga, Yong Chan Jung et al. · Applied Physics Letters · 2021 · 32 citations · Full text

, , +15

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