Concepedia

Diane McCafferty

DM

3

Publications

33

Citations

3

H-Index

2005

Active since

Affiliations

ASML (Netherlands)(Current)

Carl Zeiss (Germany)

Diane McCafferty is an author at ASML (Netherlands) specializing in 3d printing, microfabrication, and applied physics.

Top concepts

3D PrintingEngineeringApplied PhysicsMicrofabricationElectronic PackagingMicroscopyOptoelectronicsMicroelectronicsOptical MaterialsOptical Properties

Publications per year

2005–2007

3

Publications

3

32nm node technology development using interference immersion lithography

Harry Sewell, Diane McCafferty, Louis Markoya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 12 citations

Engineering, Water-based Immersion Lithography, Electron-beam Lithography +16

The next phase for immersion lithography

Harry Sewell, Jan Mulkens, Diane McCafferty et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Extending immersion lithography with high-index materials: results of a feasibility study

Harry Sewell, Jan Mulkens, Paul Graeupner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 10 citations

Optical Materials, Engineering, Electron-beam Lithography +28

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