Statistics
Publications
23
Citations
770
H-Index
17
Active since
2005
Yi Cao is an author at SunEdison (United States) specializing in materials science, materials engineering, and natural sciences.
Publications per year
2005–2023
23
23
Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations
Natural Sciences, Materials Engineering, Materials Science +15
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