Jeremy Dunning

Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications

Xiao-An Fu, Jeremy Dunning, Christian A. Zorman et al. · Sensors and Actuators A Physical · 2004 · 65 citations

Materials Science, Electrical Engineering, Dual Precursor Lpcvd +9

Mechanical properties of epitaxial 3C silicon carbide thin films

Kamili M. Jackson, Jeremy Dunning, Christian A. Zorman et al. · Journal of Microelectromechanical Systems · 2005 · 56 citations

Materials Engineering, Materials Science, Engineering +13

Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition

Xiao-An Fu, Jeremy Dunning, Christian A. Zorman et al. · Thin Solid Films · 2005 · 50 citations

Materials Science, Materials Engineering, Elastic Modulus +9

A bio-inspired, chemo-responsive polymer nanocomposite for mechanically dynamic microsystems

Jeremy Dunning, James P. Harris, J. R. Capadona et al. · TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference · 2009 · 20 citations

Engineering, Biomimetic Materials, Polymer Nanotechnology +20

Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications

Xiao-An Fu, Jeremy Dunning, Mehran Mehregany et al. · Journal of The Electrochemical Society · 2011 · 19 citations

Materials Science, Electrical Engineering, Engineering +14