S. Maubert

A low voltage silicon micro-pump based on piezoelectric thin films

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · Sensors and Actuators A Physical · 2016 · 78 citations

Electrical Engineering, Engineering, Microfabrication +6

Piezoelectric Micro-pump with PZT Thin Film for Low Consumption Microfluidic Devices

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · Procedia Engineering · 2014 · 21 citations · Full text

A novel volumetric silicon micropump with integrated sensors

Olivier Fuchs, Yves Fouillet, S. Maubert et al. · Microelectronic Engineering · 2012 · 20 citations

Engineering, Microfabrication, Mechanical Engineering +4

High performance k=2.5 ULK backend solution using an improved TFHM architecture, extendible to the 45nm technology node

Robert Fox, O. Hinsinger, E. Richard et al. · 2006 · 17 citations

Low-power Electronics, Improved Tfhm Architecture, Electrical Engineering +13

Integration of PZT thin films on a microfluidic complex system

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · 2014 · 14 citations

Engineering, Microelectromechanical Systems, Biofabrication +23