M. Cochet

A low voltage silicon micro-pump based on piezoelectric thin films

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · Sensors and Actuators A Physical · 2016 · 78 citations

Electrical Engineering, Engineering, Microfabrication +6

Suspended Nanochannel Resonator Arrays with Piezoresistive Sensors for High-Throughput Weighing of Nanoparticles in Solution

Marco Gagino, Georgios Katsikis, Selim Olçum et al. · ACS Sensors · 2020 · 23 citations

Piezoelectric Micro-pump with PZT Thin Film for Low Consumption Microfluidic Devices

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · Procedia Engineering · 2014 · 21 citations · Full text

A novel volumetric silicon micropump with integrated sensors

Olivier Fuchs, Yves Fouillet, S. Maubert et al. · Microelectronic Engineering · 2012 · 20 citations

Engineering, Microfabrication, Mechanical Engineering +4

Integration of PZT thin films on a microfluidic complex system

P.-H. Cazorla, Olivier Fuchs, M. Cochet et al. · 2014 · 14 citations

Engineering, Microelectromechanical Systems, Biofabrication +23