A I Zotovich

Actinometry of O, N and F atoms

D. V. Lopaev, A V Volynets, Sergey Zyryanov et al. · Journal of Physics D Applied Physics · 2017 · 89 citations

Engineering, Atomic Emission Spectroscopy, Glow Discharge +17

N₂ dissociation and kinetics of N(⁴S) atoms in nitrogen DC glow discharge

A V Volynets, D. V. Lopaev, A. A. Chukalovsky et al. · Journal of Physics D Applied Physics · 2018 · 57 citations

Engineering, Physics, Atomic Emission Spectroscopy +11

Multifold study of volume plasma chemistry in Ar/CF₄and Ar/CHF₃CCP discharges

A I Zotovich, D. V. Lopaev, Sergey Zyryanov et al. · Plasma Sources Science and Technology · 2017 · 47 citations

Engineering, Radio Frequency, Plasma Science +17

Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach

Liping Zhang, Jean‐François de Marneffe, Markus Heyne et al. · ECS Journal of Solid State Science and Technology · 2014 · 35 citations

Experimental and PIC MCC study of electron cooling—re-heating and plasma density decay in low pressure rf ccp argon afterglow

A. S. Kovalev, A.N. Vasilieva, A I Zotovich et al. · Plasma Sources Science and Technology · 2019 · 25 citations