Concepedia

Mikio Sawai

MS

6

Publications

244

Citations

6

H-Index

1993

Active since

Affiliations

Takeda (Japan)(Current)

Nagoya University

Institute for Plasma Research

Mikio Sawai is an author at Takeda (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1993–2003

6

Publications

6

Experimental Observation of Vertically Polarized Transverse Dust-Lattice Wave Propagating in a One-Dimensional Strongly Coupled Dust Chain

T. Misawa, Nobutada OHNO, K. Asano et al. · Physical Review Letters · 2001 · 105 citations

, , +13

Structural and Electrical Properties of Ta<sub>2</sub>O<sub>5</sub> Grown by the Plasma-Enhanced Liquid Source CVD Using Penta Ethoxy Tantalum Source

Prakash A. Murawala, Mikio Sawai, Toshiaki Tatsuta et al. · Japanese Journal of Applied Physics · 1993 · 73 citations

, , +13

Dynamic behaviors of dust particles in the plasma–sheath boundary

S. Takamura, T. Misawa, N. Ohno et al. · Physics of Plasmas · 2001 · 31 citations

, , +16

High-resolution resist etching for quartermicron lithography using O2/N2 supermagnetron plasma

Haruhisa Kinoshita, Atsushi Yamauchi, Mikio Sawai · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations

, , +13

Deposition of Cathode Coupled Plasma Enhanced Chemical Vapor Deposition SiN Films Using Liquid Source Material

Atsufumi Ohgishi, Shin‐ichi Motoyama, Mikio Sawai et al. · Japanese Journal of Applied Physics · 2003 · 12 citations

, , +16

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