Atsushi Yamauchi is an author at Shizuoka University specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsPhysicsChemistryNanomaterialsNanotechnologyNanoelectronicsSurface Science
Publications per year
1996–2006
3
3
High-resolution resist etching for quartermicron lithography using O2/N2 supermagnetron plasma
Haruhisa Kinoshita, Atsushi Yamauchi, Mikio Sawai · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations
Materials Science, Quartermicron Lithography, Bilayer Resist +13
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