Haruhisa Kinoshita

Formation of electrically conductive nitrogen-doped amorphous hydrogenated carbon (diamond-like carbon) films by the supermagnetron plasma chemical vapor deposition method

Haruhisa Kinoshita, Atsushi Yamauchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 27 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Preparation of electrically conductive diamond-like carbon films using i-C4H10/N2 supermagnetron plasma

Haruhisa Kinoshita, Takuya Hando, Masahiro Yoshida · Journal of Applied Physics · 2001 · 23 citations

Materials Science, Diamond-like Carbon, Fourier Transform +15

Plasma characteristics and etch uniformity in CF4 magnetron etching using an annular permanent magnet

Haruhisa Kinoshita, Toshimasa Ishida, Seigo Ohno · Journal of Applied Physics · 1987 · 23 citations

A new supermagnetron plasma etcher remarkably suited for high performance etching

Haruhisa Kinoshita, Osamu Matsumoto · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 20 citations

Engineering, Vacuum Device, High Performance +17

Intermittent chemical vapor deposition of thick electrically conductive diamond-like amorphous carbon films using i-C4H10/N2 supermagnetron plasma

Haruhisa Kinoshita, Toichi Murakami · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 19 citations

Engineering, I-c4h10/n2 Supermagnetron Plasma, Thin Film Process Technology +17