M. Jaso

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Publications

Citations

1.1K

H-Index

Active since

1984

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

Massachusetts Institute of Technology

BAE Systems (United States)

MIT Lincoln Laboratory

M. Jaso is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, materials engineering, and etching processes.

Publications per year

1984–2006

Publications

Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects

F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations

Engineering, Materials Engineering, Materials Science +17

Flux growth and properties of KTiOPO4

J.C. Jacco, G. M. Loiacono, M. Jaso et al. · Journal of Crystal Growth · 1984 · 116 citations

Natural Sciences, Earth Sciences, Meteorology +7

Sub-μm, planarized, Nb-AlO<i>x</i>-Nb Josephson process for 125 mm wafers developed in partnership with Si technology

M. B. Ketchen, D.J. Pearson, A. W. Kleinsasser et al. · Applied Physics Letters · 1991 · 108 citations

Engineering, Electrical Engineering, Materials Science +17

Surface analysis of realistic semiconductor microstructures

G. S. Oehrlein, K. Chan, M. Jaso et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 45 citations

Engineering, Materials Engineering, Materials Science +17

Selective Dry Etching of Germanium with Respect to Silicon and Vice Versa

G. S. Oehrlein, T. D. Bestwick, P. L. Jones et al. · Journal of The Electrochemical Society · 1991 · 38 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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